Minnesota Nanofabrication

Wafer Arm

A robot arm that moves wafers between tools.

Planned Wafer Handling

Overview

Work in progress

What the Wafer Arm does, how it fits into the line, and why the fab needs one.

Design

Work in progress

How it is built: the subsystems it breaks into, the block diagram, and the decisions behind them.

Status

Work in progress

Where the build stands right now: what is done, what is being worked on, and what is blocked.

Assembly

Work in progress

How the thing actually goes together, step by step, in the order a builder needs it.