Tube Furnace
Heats wafers to ~1000 °C to grow oxide and drive in dopants.
In build
Oxide & Anneal
Overview
Work in progress
What the Tube Furnace does, how it fits into the line, and why the fab needs one.
Design
Work in progress
How it is built: the subsystems it breaks into, the block diagram, and the decisions behind them.
Status
Work in progress
Where the build stands right now: what is done, what is being worked on, and what is blocked.
Assembly
Work in progress
How the thing actually goes together, step by step, in the order a builder needs it.