Cleanroom Microenvironment
Clean-air boxes around each tool instead of a full cleanroom.
In build
Contamination Control
Overview
Work in progress
What the Cleanroom Microenvironment does, how it fits into the line, and why the fab needs one.
Design
Work in progress
How it is built: the subsystems it breaks into, the block diagram, and the decisions behind them.
Status
Work in progress
Where the build stands right now: what is done, what is being worked on, and what is blocked.
Assembly
Work in progress
How the thing actually goes together, step by step, in the order a builder needs it.